Modal analysis of a four-bar linkage MEMS microgripper with co-operative electrostatic actuation

Abstract. MEMS-Technology based microgrippers have been recently used in different fields of applications. These microsystems can be actuated by means electrostatic actuators, such as linear or rotary comb drives, but the robustness and feasibility components static well dynamic conditions still raises some concerns. In order to contribute fill this gap, properties a MEMS-Techology Based silicon microgripper, on four-bar linkage, with co-operative comb-drives, are here numerically analysed. The analysis vibrations is essential many MEMS applications since may lead significant positioning errors undesirable contacts between anchored floating fingers comb-drives. present investigation aims assess critical modes microgripper ascertain possibility impact fixed moving relative displacements tolerable only if center rotation coincident conjugate profiles. Hence, nature motion for first vibration has assessed Finite Element Analysis (FEA) avoid operational issues.